Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS
نویسندگان
چکیده
منابع مشابه
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
Despite significant advances in surface micromachining technology, stiction remains a key problem, severely limiting the realization Ž . and reliability of many micro-electro-mechanical systems MEMS devices. In this article, we focus on self-assembled monolayers as release and anti-stiction coatings for MEMS. Their formation mechanism, the microstructure coating process, and the characteristics...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2007
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2007.904342